Microfluidic poly-si electrodes capacitor (fabricate & testing)

The objectives of this project is to fabricate a micro channel on silicon wafer and to measure the capacitance and electrical properties as a whole.

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Detalles Bibliográficos
Autor Principal: Esmal Fhadly Abd Malek (Author)
Formato: Electrónico Software Base de Datos
Idioma:English
Subjects:
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Descripción
Summary:The objectives of this project is to fabricate a micro channel on silicon wafer and to measure the capacitance and electrical properties as a whole.
descrición da copia:Final Year project
Descrición Física:1 CD-ROM 4 3/4 in.