Microfluidic poly-si electrodes capacitor (fabricate & testing)
The objectives of this project is to fabricate a micro channel on silicon wafer and to measure the capacitance and electrical properties as a whole.
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Autor principal: | |
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Formato: | Recurso Electrónico Software Base de Dados |
Idioma: | English |
Assuntos: | |
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Resumo: | The objectives of this project is to fabricate a micro channel on silicon wafer and to measure the capacitance and electrical properties as a whole. |
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Descrição do item: | Final Year project |
Descrição Física: | 1 CD-ROM 4 3/4 in. |