Microfluidic poly-si electrodes capacitor (fabricate & testing)

The objectives of this project is to fabricate a micro channel on silicon wafer and to measure the capacitance and electrical properties as a whole.

Kaydedildi:
Detaylı Bibliyografya
Yazar: Esmal Fhadly Abd Malek (Yazar)
Materyal Türü: Elektronik Yazılım Veritabanı
Dil:English
Konular:
Etiketler: Etiketle
Etiket eklenmemiş, İlk siz ekleyin!
LEADER 01176nmi a2200241 a 4500
001 vtls000050980
003 MY-KaKUK
005 20210816100246.0
007 co bg llla a
008 111129s2007 my f d 000 0 eng d
039 9 |a 201111291724  |b VLOAD  |c 201111161331  |d VLOAD  |c 201003021132  |d SMT  |c 200904161045  |d RAR  |y 200903231556  |z SNSA 
090 0 0 |a TK7874  |b M7E76 2007 
100 0 |a Esmal Fhadly Abd Malek  |e author 
245 1 0 |a Microfluidic poly-si electrodes capacitor (fabricate & testing)  |h [electronic resource] /  |c Esmal Fhadly Abd Malek 
264 0 |a Perlis, Malaysia  |b School of Microelectronic Engineering, Universiti Malaysia Perlis  |c 2007. 
300 |a 1 CD-ROM  |c 4 3/4 in. 
500 |a Final Year project 
520 |a The objectives of this project is to fabricate a micro channel on silicon wafer and to measure the capacitance and electrical properties as a whole. 
650 0 |a Microelectronics. 
949 |a VIRTUAITEM  |d 30000  |f 1  |x 701  |6 902000012  |a TK7874 M7E76 2007 
942 |2 lcc  |c COMPFILE 
999 |c 92670  |d 92670 
952 |0 0  |1 0  |2 lcc  |4 0  |6 TK7874 M7 E76 02007  |7 0  |9 90238  |a PTSFP  |b PTSFP  |c 8  |d 2021-08-16  |l 0  |o TK7874 M7E76 2007  |p 902000012  |r 2021-08-16  |t 1  |w 2021-08-16  |y COMPFILE