Microfluidic poly-si electrodes capacitor (fabricate & testing)
The objectives of this project is to fabricate a micro channel on silicon wafer and to measure the capacitance and electrical properties as a whole.
Kaydedildi:
| Yazar: | |
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| Materyal Türü: | Elektronik Yazılım Veritabanı |
| Dil: | English |
| Konular: | |
| Etiketler: |
Etiketle
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| LEADER | 01176nmi a2200241 a 4500 | ||
|---|---|---|---|
| 001 | vtls000050980 | ||
| 003 | MY-KaKUK | ||
| 005 | 20210816100246.0 | ||
| 007 | co bg llla a | ||
| 008 | 111129s2007 my f d 000 0 eng d | ||
| 039 | 9 | |a 201111291724 |b VLOAD |c 201111161331 |d VLOAD |c 201003021132 |d SMT |c 200904161045 |d RAR |y 200903231556 |z SNSA | |
| 090 | 0 | 0 | |a TK7874 |b M7E76 2007 |
| 100 | 0 | |a Esmal Fhadly Abd Malek |e author | |
| 245 | 1 | 0 | |a Microfluidic poly-si electrodes capacitor (fabricate & testing) |h [electronic resource] / |c Esmal Fhadly Abd Malek |
| 264 | 0 | |a Perlis, Malaysia |b School of Microelectronic Engineering, Universiti Malaysia Perlis |c 2007. | |
| 300 | |a 1 CD-ROM |c 4 3/4 in. | ||
| 500 | |a Final Year project | ||
| 520 | |a The objectives of this project is to fabricate a micro channel on silicon wafer and to measure the capacitance and electrical properties as a whole. | ||
| 650 | 0 | |a Microelectronics. | |
| 949 | |a VIRTUAITEM |d 30000 |f 1 |x 701 |6 902000012 |a TK7874 M7E76 2007 | ||
| 942 | |2 lcc |c COMPFILE | ||
| 999 | |c 92670 |d 92670 | ||
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