Microfluidic poly-si electrodes capacitor (fabricate & testing)

Microfluidic poly-si electrodes capacitor (fabricate & testing)

The objectives of this project is to fabricate a micro channel on silicon wafer and to measure the capacitance and electrical properties as a whole.

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Dades bibliogràfiques
Autor principal:	Esmal Fhadly Abd Malek (Autor)
Format:	Electrònic Software Base de dades
Idioma:	English
Matèries:	Microelectronics.
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