Microfluidic poly-si electrodes capacitor (fabricate & testing)

Microfluidic poly-si electrodes capacitor (fabricate & testing)

The objectives of this project is to fabricate a micro channel on silicon wafer and to measure the capacitance and electrical properties as a whole.

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書目詳細資料
主要作者:	Esmal Fhadly Abd Malek (Author)
格式:	電子軟件 Database
語言:	English
主題:	Microelectronics.
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