Study the effect of bird's beak on fully recessed locos and poly buffered locos using 2 different pad oxide
The aim of this project is to produces the fully-recessed LOCOS and poly-buffered LOCOS. The project comprises several steps of process to produce the Poly-buffered locos and fully recessed LOCOS. In case of this project, the poly-buffered locos is actually one of the isolation technique that replac...
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| Formato: | Recurso Electrónico Software Base de Dados |
| Idioma: | English |
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| LEADER | 01652nmi a2200241 a 4500 | ||
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| 100 | 0 | |a Hafizal Hafiz Sarjoni |e author | |
| 245 | 1 | 0 | |a Study the effect of bird's beak on fully recessed locos and poly buffered locos using 2 different pad oxide |h [electronic resource] / |c Hafizal Hafiz Sarjoni. |
| 264 | 0 | |a Perlis, Malaysia |b School of Microelectronic Engineering, Universiti Malaysia Perlis |c 2007. | |
| 300 | |a 1 CD-ROM |c 4 3/4 in. | ||
| 500 | |a Final Year Project | ||
| 520 | 3 | |a The aim of this project is to produces the fully-recessed LOCOS and poly-buffered LOCOS. The project comprises several steps of process to produce the Poly-buffered locos and fully recessed LOCOS. In case of this project, the poly-buffered locos is actually one of the isolation technique that replacing the conventional process. The main target is to suppress the bird's beak that will be forming during the process. The area of this research is to study the effect of the poly-silicon layer and the composition of oxide that exist underneath of polysilicon and nitride layer. | |
| 650 | 0 | |a Microelectronics. | |
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