Study the effect of bird's beak on fully recessed locos and poly buffered locos using 2 different pad oxide

The aim of this project is to produces the fully-recessed LOCOS and poly-buffered LOCOS. The project comprises several steps of process to produce the Poly-buffered locos and fully recessed LOCOS. In case of this project, the poly-buffered locos is actually one of the isolation technique that replac...

Deskribapen osoa

Gorde:
Xehetasun bibliografikoak
Egile nagusia: Hafizal Hafiz Sarjoni (Egilea)
Formatua: Baliabide elektronikoa Software Datu-basea
Hizkuntza:English
Gaiak:
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