Study the effect of bird's beak on fully recessed locos and poly buffered locos using 2 different pad oxide

The aim of this project is to produces the fully-recessed LOCOS and poly-buffered LOCOS. The project comprises several steps of process to produce the Poly-buffered locos and fully recessed LOCOS. In case of this project, the poly-buffered locos is actually one of the isolation technique that replac...

Disgrifiad llawn

Wedi'i Gadw mewn:
Manylion Llyfryddiaeth
Prif Awdur: Hafizal Hafiz Sarjoni (Awdur)
Fformat: Electronig Meddalwedd Cronfa ddata
Iaith:English
Pynciau:
Tagiau: Ychwanegu Tag
Dim Tagiau, Byddwch y cyntaf i dagio'r cofnod hwn!