Study the effect of bird's beak on fully recessed locos and poly buffered locos using 2 different pad oxide

The aim of this project is to produces the fully-recessed LOCOS and poly-buffered LOCOS. The project comprises several steps of process to produce the Poly-buffered locos and fully recessed LOCOS. In case of this project, the poly-buffered locos is actually one of the isolation technique that replac...

Full description

Saved in:
Bibliographic Details
Main Author: Hafizal Hafiz Sarjoni (Author)
Format: Electronic Software Database
Language:English
Subjects:
Tags: Add Tag
No Tags, Be the first to tag this record!