Study the effect of bird's beak on fully recessed locos and poly buffered locos using 2 different pad oxide

The aim of this project is to produces the fully-recessed LOCOS and poly-buffered LOCOS. The project comprises several steps of process to produce the Poly-buffered locos and fully recessed LOCOS. In case of this project, the poly-buffered locos is actually one of the isolation technique that replac...

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Autore principale: Hafizal Hafiz Sarjoni (Autore)
Natura: Elettronico Software Database
Lingua:English
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