MEMS design and fabrication (EMT 432/4) /
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| Sprache: | English |
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| 090 | 0 | 0 | |a TK7875 |b H352 2008 |c f |
| 100 | 0 | |a Hasnizah Aris. |e author | |
| 245 | 1 | 0 | |a MEMS design and fabrication (EMT 432/4) / |c Hasnizah Aris, Zaliman Sauli, Nur Hamidah Abdul Halim. |
| 246 | 0 | 0 | |a EMT 432/4 |
| 264 | 0 | |a Kangar, Perlis |b Penerbit Universiti Malaysia Perlis (UniMAP) |c 2008. | |
| 300 | |a 114 pages |b illustrations |c 30 cm. | ||
| 650 | 0 | |a Microelectromechanical systems |x Design and construction. | |
| 650 | 0 | |a Microfabrication. | |
| 650 | 0 | |a Microelectromechanical systems | |
| 700 | 0 | |a Zaliman Sauli. | |
| 700 | 0 | |a Nur Hamidah Abdul Halim. | |
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