APA (7th ed.) Citation

Lindroos, V. Handbook of silicon based MEMS materials and technologies.

Chicago Style (17th ed.) Citation

Lindroos, Veikko. Handbook of Silicon Based MEMS Materials and Technologies.

MLA (8th ed.) Citation

Lindroos, Veikko. Handbook of Silicon Based MEMS Materials and Technologies.

Warning: These citations may not always be 100% accurate.