Study of the thickness of the silicon dioxide on wafer using dry and wet oxidation method
This final year project focused on four goals: to study the dry and wet oxidation thickness, to grow a thin layer of silicon dioxide (SiO2) on Si wafer, to determine the parameter required for thickness needed, and to compare with the simulation and theoretical thickness to achieve the most accurate...
Sábháilte in:
Príomhchruthaitheoir: | Mohamad Fadzli Ali (Údar) |
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Formáid: | Leictreonach Bogearraí Bunachar sonraí |
Teanga: | English |
Ábhair: | |
Clibeanna: |
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Míreanna comhchosúla
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Theoretical study, simulation & fabrication on dry oxidation in terms of Si02 layer thinckness, resistivity & surface roughness
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Study of the temperature effect on thickness and surface roughness of Si02
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