Study on diffusivity of gallium dopant in silicon using spin on dopant (SOD) technique

Study on diffusivity of gallium dopant in silicon using spin on dopant (SOD) technique

In this final year project the diffusivity of gallium using spin on dopant technique is studied. The study includes mathematical calculation, computer simulation, fabrication and characterization of the diffusivity criteria such as surface concentration, dopant profiling and resistivity.

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Bibliografische gegevens
Hoofdauteur:	Mohd Rosydi Zakaria (Auteur)
Formaat:	Elektronisch Software Databank
Taal:	English
Onderwerpen:	Microelectronics.
Tags:	Voeg label toe Geen labels, Wees de eerste die dit record labelt!

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door: Mccluskey, Matthew D.
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