The influence on the accelerating voltages on the growth of the square structure during electron beam induced deposition (EBID) method
In this final year project, EBID method has been used to deposit the square shape carbon structure on the substrate using the residual gas hydrocarbon as the precursor gas during deposition.
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| Tác giả chính: | |
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| Định dạng: | Điện tử Phần mềm Cơ sở dữ liệu |
| Ngôn ngữ: | English |
| Những chủ đề: | |
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| 100 | 0 | |a Muhammad Afiq Abdul Aziz |e author | |
| 245 | 1 | 0 | |a The influence on the accelerating voltages on the growth of the square structure during electron beam induced deposition (EBID) method |h [electronic resource] / |c Muhammad Afiq Abdul Aziz. |
| 264 | 0 | |a Kangar, Perlis |b School of Microelectronic Engineering, Universiti Malaysia Perlis |c 2008. | |
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| 500 | |a Final Year Project | ||
| 520 | |a In this final year project, EBID method has been used to deposit the square shape carbon structure on the substrate using the residual gas hydrocarbon as the precursor gas during deposition. | ||
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