Study of deposition time influence the conical structure during electron beam induced deposition (EBID)
This final year project is about studying parameter (deposition time) influence during electron beam induced deposition (EBID) in scanning electron microscopy (SEM). EBID is a versatile micro and nanofabrication technique based on electron-induced dissociation of carrying gas molecules adsorbed on a...
保存先:
第一著者: | |
---|---|
フォーマット: | 電子媒体 ソフトウェア データベース |
言語: | English |
主題: | |
タグ: |
タグ追加
タグなし, このレコードへの初めてのタグを付けませんか!
|
要約: | This final year project is about studying parameter (deposition time) influence during electron beam induced deposition (EBID) in scanning electron microscopy (SEM). EBID is a versatile micro and nanofabrication technique based on electron-induced dissociation of carrying gas molecules adsorbed on a target. |
---|---|
記述事項: | Final Year Project |
物理的記述: | 1 CD-ROM 4 3/4 in. |