Study of deposition time influence the conical structure during electron beam induced deposition (EBID)

This final year project is about studying parameter (deposition time) influence during electron beam induced deposition (EBID) in scanning electron microscopy (SEM). EBID is a versatile micro and nanofabrication technique based on electron-induced dissociation of carrying gas molecules adsorbed on a...

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Bibliografiska uppgifter
Huvudupphovsman: Mohamad Shahrizal Md Ilias (Författare, medförfattare)
Materialtyp: Elektronisk Datorprogram Databas
Språk:English
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Beskrivning
Sammanfattning:This final year project is about studying parameter (deposition time) influence during electron beam induced deposition (EBID) in scanning electron microscopy (SEM). EBID is a versatile micro and nanofabrication technique based on electron-induced dissociation of carrying gas molecules adsorbed on a target.
Beskrivning:Final Year Project
Fysisk beskrivning:1 CD-ROM 4 3/4 in.