Study of deposition time influence the conical structure during electron beam induced deposition (EBID)

Study of deposition time influence the conical structure during electron beam induced deposition (EBID)

This final year project is about studying parameter (deposition time) influence during electron beam induced deposition (EBID) in scanning electron microscopy (SEM). EBID is a versatile micro and nanofabrication technique based on electron-induced dissociation of carrying gas molecules adsorbed on a...

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Dettagli Bibliografici
Autore principale:	Mohamad Shahrizal Md Ilias (Autore)
Natura:	Elettronico Software Database
Lingua:	English
Soggetti:	Microelectronics.
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