Study of deposition time influence the conical structure during electron beam induced deposition (EBID)

Study of deposition time influence the conical structure during electron beam induced deposition (EBID)

This final year project is about studying parameter (deposition time) influence during electron beam induced deposition (EBID) in scanning electron microscopy (SEM). EBID is a versatile micro and nanofabrication technique based on electron-induced dissociation of carrying gas molecules adsorbed on a...

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Bibliografski detalji
Glavni autor:	Mohamad Shahrizal Md Ilias (Autor)
Format:	Elektronički Softver Baza podataka
Jezik:	English
Teme:	Microelectronics.
Oznake:	Dodaj oznaku Bez oznaka, Budi prvi tko označuje ovaj zapis!

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