APA (7th ed.) Citation

Murarka, S. P., Eizenberg, M., & Sinha, A. K. Interlayer dielectrics for semiconductor technologies.

Chicago Style (17th ed.) Citation

Murarka, S. P., M. Eizenberg, and A. K. Sinha. Interlayer Dielectrics for Semiconductor Technologies.

MLA (8th ed.) Citation

Murarka, S. P., et al. Interlayer Dielectrics for Semiconductor Technologies.