Interlayer dielectrics for semiconductor technologies
Semiconductor technologies are moving at such a fast pace that new materials are needed in all types of application. Manipulating the materials and their properties at atomic dimensions has become a must. This book presents the case of interlayer dielectrics materials whilst considering these challe...
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| Other Authors: | , , |
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| Format: | Electronic Software eBook |
| Language: | English |
| Subjects: | |
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