Wan Mokhdzani Wan Nor Haimi. Vertical electrostatic comb-drive actuator for MEMs design.
Cita Chicago (17th ed.)Wan Mokhdzani Wan Nor Haimi. Vertical Electrostatic Comb-drive Actuator for MEMs Design.
Cita MLA (8th ed.)Wan Mokhdzani Wan Nor Haimi. Vertical Electrostatic Comb-drive Actuator for MEMs Design.
Atenció: Aquestes cites poden no estar 100% correctes.