Wan Mokhdzani Wan Nor Haimi. Vertical electrostatic comb-drive actuator for MEMs design.
Chicagoスタイル(17版)引用形式Wan Mokhdzani Wan Nor Haimi. Vertical Electrostatic Comb-drive Actuator for MEMs Design.
MLA(8版)引用形式Wan Mokhdzani Wan Nor Haimi. Vertical Electrostatic Comb-drive Actuator for MEMs Design.
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