Vertical electrostatic comb-drive actuator for MEMs design /
This final year project is about vertical electrostatic comb-drive actuator. A comb-finger structure is disclosed for use in optical switching applications. Large displacements of movable fingers were in consideration for the optical applications. The comb-finger structure is able to produce actuati...
Saved in:
| Hovedforfatter: | |
|---|---|
| Format: | Software Database |
| Sprog: | English |
| Fag: | |
| Tags: |
Tilføj Tag
Ingen Tags, Vær først til at tagge denne postø!
|
| Summary: | This final year project is about vertical electrostatic comb-drive actuator. A comb-finger structure is disclosed for use in optical switching applications. Large displacements of movable fingers were in consideration for the optical applications. The comb-finger structure is able to produce actuation force for a certain amount of displacement for the use of deflection. The comb-finger structure moves in a perpendicular direction to the substrate as a function of applied voltages. Actuation force changes for different physical parameters of the comb finger structure. |
|---|---|
| Emne beskrivelse: | Final Year Project |
| Fysisk beskrivelse: | 1 CD-ROM 4 3/4 in. |