Vertical electrostatic comb-drive actuator for MEMs design /
This final year project is about vertical electrostatic comb-drive actuator. A comb-finger structure is disclosed for use in optical switching applications. Large displacements of movable fingers were in consideration for the optical applications. The comb-finger structure is able to produce actuati...
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| Language: | English |
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| LEADER | 01778cmi a2200301 i 4500 | ||
|---|---|---|---|
| 001 | vtls000051359 | ||
| 003 | MY-KaKUK | ||
| 005 | 20210816100358.0 | ||
| 006 | m fq d | ||
| 007 | co bg llla a | ||
| 008 | 111129s2008 my f| d 000 0 eng d | ||
| 039 | 9 | |a 202006111120 |b SMT |c 201501081252 |d NI |c 201111291743 |d VLOAD |c 201111161333 |d VLOAD |y 200904151302 |z SNSA | |
| 040 | |a MYPMP |b eng |e rda |c MYPMP | ||
| 090 | 0 | 0 | |a TK7874 |b M7M716 2008 |
| 100 | 0 | |a Wan Mokhdzani Wan Nor Haimi, |e author | |
| 245 | 1 | 0 | |a Vertical electrostatic comb-drive actuator for MEMs design / |c Wan Mokhdzani Wan Nor Haimi. |
| 264 | 0 | |a Kangar, Perlis |b School of Microelectronic Engineering, Universiti Malaysia Perlis |c 2008. | |
| 300 | |a 1 CD-ROM |c 4 3/4 in. | ||
| 336 | |a text |b txt |2 rdacontent | ||
| 337 | |a computer |b c |2 rdamedia | ||
| 338 | |a computer disc |b cd |2 rdacarrier | ||
| 500 | |a Final Year Project | ||
| 520 | |a This final year project is about vertical electrostatic comb-drive actuator. A comb-finger structure is disclosed for use in optical switching applications. Large displacements of movable fingers were in consideration for the optical applications. The comb-finger structure is able to produce actuation force for a certain amount of displacement for the use of deflection. The comb-finger structure moves in a perpendicular direction to the substrate as a function of applied voltages. Actuation force changes for different physical parameters of the comb finger structure. | ||
| 650 | 0 | |a Microelectronics. | |
| 949 | |a VIRTUAITEM |d 30000 |f 1 |x 701 |6 902000247 |a TK7874 M7M716 2008 | ||
| 942 | |2 lcc |c COMPFILE | ||
| 999 | |c 93560 |d 93560 | ||
| 952 | |0 0 |1 0 |2 lcc |4 0 |6 TK7874 M7 M716 02008 |7 0 |9 91298 |a PTSFP |b PTSFP |c 8 |d 2021-08-16 |l 0 |o TK7874 M7M716 2008 |p 902000247 |r 2021-08-16 |t 1 |w 2021-08-16 |y COMPFILE | ||