Vertical electrostatic comb-drive actuator for MEMs design /
This final year project is about vertical electrostatic comb-drive actuator. A comb-finger structure is disclosed for use in optical switching applications. Large displacements of movable fingers were in consideration for the optical applications. The comb-finger structure is able to produce actuati...
Saved in:
| 主要作者: | |
|---|---|
| 格式: | 软件 数据库 |
| 语言: | English |
| 主题: | |
| 标签: |
添加标签
没有标签, 成为第一个标记此记录!
|