Vertical electrostatic comb-drive actuator for MEMs design /
This final year project is about vertical electrostatic comb-drive actuator. A comb-finger structure is disclosed for use in optical switching applications. Large displacements of movable fingers were in consideration for the optical applications. The comb-finger structure is able to produce actuati...
Salvato in:
| Autore principale: | |
|---|---|
| Natura: | Software Database |
| Lingua: | English |
| Soggetti: | |
| Tags: |
Aggiungi Tag
Nessun Tag, puoi essere il primo ad aggiungerne! !
|
Lascia un commento!