Zaharah Mohamad. Study of the effect of different gases parameter in dry etching process on etch rate profile.
Cita Chicago (17th ed.)Zaharah Mohamad. Study of the Effect of Different Gases Parameter in Dry Etching Process on Etch Rate Profile.
Cita MLA (8th ed.)Zaharah Mohamad. Study of the Effect of Different Gases Parameter in Dry Etching Process on Etch Rate Profile.
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