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Zaharah Mohamad. Study of the effect of different gases parameter in dry etching process on etch rate profile.

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Zaharah Mohamad. Study of the Effect of Different Gases Parameter in Dry Etching Process on Etch Rate Profile.

Dyfyniad MLA

Zaharah Mohamad. Study of the Effect of Different Gases Parameter in Dry Etching Process on Etch Rate Profile.

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