Zaharah Mohamad. Study of the effect of different gases parameter in dry etching process on etch rate profile.
Dyfyniad Arddull ChicagoZaharah Mohamad. Study of the Effect of Different Gases Parameter in Dry Etching Process on Etch Rate Profile.
Dyfyniad MLAZaharah Mohamad. Study of the Effect of Different Gases Parameter in Dry Etching Process on Etch Rate Profile.
Rhybudd: Mae'n bosib nad yw'r dyfyniadau hyn bob amser yn 100% cywir.