Zaharah Mohamad. Study of the effect of different gases parameter in dry etching process on etch rate profile.
Cita Chicago Style (17a ed.)Zaharah Mohamad. Study of the Effect of Different Gases Parameter in Dry Etching Process on Etch Rate Profile.
Cita MLA (8a ed.)Zaharah Mohamad. Study of the Effect of Different Gases Parameter in Dry Etching Process on Etch Rate Profile.
Precaución: Estas citas no son 100% exactas.