APA aipamena

Zaharah Mohamad. Study of the effect of different gases parameter in dry etching process on etch rate profile.

Chicago Style aipamena

Zaharah Mohamad. Study of the Effect of Different Gases Parameter in Dry Etching Process on Etch Rate Profile.

MLA aipamena

Zaharah Mohamad. Study of the Effect of Different Gases Parameter in Dry Etching Process on Etch Rate Profile.

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