Zaharah Mohamad. Study of the effect of different gases parameter in dry etching process on etch rate profile.
Chicago (17e ed.) BronvermeldingZaharah Mohamad. Study of the Effect of Different Gases Parameter in Dry Etching Process on Etch Rate Profile.
MLA (8e ed.) BronvermeldingZaharah Mohamad. Study of the Effect of Different Gases Parameter in Dry Etching Process on Etch Rate Profile.
Let op: Deze citaties zijn niet altijd 100% accuraat.