APA citiranje

Zaharah Mohamad. Study of the effect of different gases parameter in dry etching process on etch rate profile.

Chicago Style (17th ed.) Citation

Zaharah Mohamad. Study of the Effect of Different Gases Parameter in Dry Etching Process on Etch Rate Profile.

MLA citiranje

Zaharah Mohamad. Study of the Effect of Different Gases Parameter in Dry Etching Process on Etch Rate Profile.

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