Study of the effect of different gases parameter in dry etching process on etch rate profile

The principal focus of this project is dry etching technique by using the Inductively Couple Plasma -Reactive Ion Etching (ICP-RIE). This final year project is about to understand and control the equipment for dry etches process. The equipment in dry etch process is inductively couple plasma- reacti...

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Bibliografiske detaljer
Hovedforfatter:	Zaharah Mohamad (Author)
Format:	Electronisk Software Database
Sprog:	English
Fag:	Microelectronics.
Tags:	Tilføj Tag Ingen Tags, Vær først til at tagge denne postø!

Lignende værker

Reactive ion etching (RIE) etched wet-silica-on-silicon analysis for fluidwettability
af: Noor Aini Hamimah Abd. Rahim

Study of aspect ratio performance on silicon oxide etching using profiler meter, AFM and SEM
af: Nur Syuhada Md. Desa

Comparison of etching optimization process by taguchi method using minitab and design expert software
af: Azleen Abu Talib

Dry Etching Technology for Semiconductors /
af: Nojiri, Kazuo
Udgivet: (2015)

Design and fabricate "wineglass" contact formation by simultaneous wet-dry etch process.
af: Mohd Norhafiz Bin. Hashim

Polysilicon process development - the effect of pecvd process parameters on the film characteristics
af: Mujahidun Mashuri

The study of the effect of MOS transistor scaling on the critical device parameters
af: Zazurina Abd Rahman

Study of the thickness of the silicon dioxide on wafer using dry and wet oxidation method
af: Mohamad Fadzli Ali

The effect of process parameters on metal step coverage for aluminum (AI) by evaporation technique
af: Noraishah Azman

Ultra violet scanner, PCB developer and etching machine
af: Nur Bazilah Mohd Suhaimi
Udgivet: (2010)

Ultra violet scanner, PCB developer and etching machine
af: Nur Bazilah Mohd Suhaimi
Udgivet: (2010)

Effect of different dielectric materials for ultrathin oxide
af: Zarimawaty Zailan

Portable etching machine/
af: Julasri Ragiman
Udgivet: (2018)

Etching & microscopy 09
Udgivet: (2009)

Portable etching machine /
af: Muhammad Azlan Shah Ibrahim
Udgivet: (2015)

Etching & microscopy 09
Udgivet: (2009)

Portable etching machine /
af: Muhammad Azlan Shah Ibrahim
Udgivet: (2015)

Study the effect of bird's beak on fully recessed locos and poly buffered locos using 2 different pad oxide
af: Hafizal Hafiz Sarjoni

Theoretical study, simulation & fabrication on dry oxidation in terms of Si02 layer thinckness, resistivity & surface roughness
af: Mohd Adam Alias

Simulation on effect of different types of channel/ drain engineering structure on MOS device performance
af: Norazlina Mohd Amin

Level 1 parameter extraction of MOSFET device
af: Azman mat Hussin

Study of the temperature effect on thickness and surface roughness of Si02
af: Mohd Azdi Asis

Study the effect of environmental noise on infrared Tx-Rx circuit signals
af: Mohd Zaihan Ibrahim

Simulation on parameter and characteristics extraction between two simulation packages (synopsys and pspice)
af: Nor Aznin Sakrani

Nanostructure formation using sem based e-beam lithography (EBL) technique : buffered oxide etch (BOE) profile
af: Nur Nazihah Halemi

The study on the effect of varing dopant concentration and diffusion time in the design of silicon avalanche diode with minimum VBR of 120+-20%
af: Yip, Siew Ling

Study of semi-recessed LOCOS for quasi-nanoscale CMOS devise isolation
af: Mohamad Idzham Abd Sani

Study of deposition time influence the conical structure during electron beam induced deposition (EBID)
af: Mohamad Shahrizal Md Ilias

Study and design infrared beacon for the blind
af: Mohd Fadzlie Rasit

Thin polycrystalline silicon process development
af: Muniyati Pakhuruddin

Study and improvement of UniMAP shower room
af: Lau, Iyu Pin

The effect of power density on the surface layer of amorphous thin film
af: Ahmad Fadzil Izaharuddin

Effect of diffusion coefficient and junction depth on variation of temperature and energy
af: Nur Ruzana Bohari

Optimization of nitride deposition process using Taguchi method
af: Low, Zen Shiang

Semiconductor optical amplifier (SOA) for photonic signal processing/
af: Latty Shazana Ismail
Udgivet: (2011)

Area array packaging processes : for BGA, flip chip and CSP /
Udgivet: (2004)

Area array packaging processes : for BGA, Flip Chip, and CSP /

Study the basic infrared tx-rx circuit design for robot
af: Nik Ahmad Faiz Abdul Jamel

Fabrication of 50 ¡Łm transistor and AINiAu interconnection process
af: Shaffie Husin

Optimization on oxidation process using 2K factorial design method
af: Yeap, Li Chain