Fundamental principles of engineering nanometrology /
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| Main Author: | |
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| Format: | Book |
| Language: | English |
| Series: | Micro and nano technologies
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| Subjects: | |
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| Physical Description: | xxvi, 321 pages illustrations 24 cm. |
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| ISBN: | 9780080964546 (hc) 0080964540 (hc) |