Handbook of sputter deposition technology : principles, technology, and applications /
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| Main Author: | |
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| Other Authors: | |
| Format: | Book |
| Language: | English |
| Published: |
New Jersey
Noyes Publications
1992
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| Edition: | Reprint ed. |
| Series: | Materials science and process technology series
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| Subjects: | |
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| Physical Description: | xii, 304 pages: illustrations; 24 cm. |
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| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0815512805 |