Computational modeling in semiconductor processing /
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| Other Authors: | |
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| Format: | Book |
| Language: | English |
| Published: |
Boston
Artech House
1995
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| Series: | The Artech House materials science library
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| Subjects: | |
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| Physical Description: | x, 363 pages: illustrations; 24 cm. |
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| ISBN: | 0890067074 |