Fabrication and characterization of microfluidic field effect transistor on silicon substrate /
The development of a silicon-based microfluidic field effect transistor has been carried out. The main objective of this study is to present from concept, the design of a microfluidic FET and to develop its appropriate process flow in fabricating the microfluidic FET on silicon wafer, which will fin...
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| Main Author: | |
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| Format: | Thesis Software eBook |
| Language: | English |
| Published: |
Perlis
School of Microelectronic Engineering, Universiti Malaysia Perlis
2010.
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