Fabrication and characterization of microfluidic field effect transistor on silicon substrate /
The development of a silicon-based microfluidic field effect transistor has been carried out. The main objective of this study is to present from concept, the design of a microfluidic FET and to develop its appropriate process flow in fabricating the microfluidic FET on silicon wafer, which will fin...
Saved in:
| Main Author: | |
|---|---|
| Format: | Thesis Software eBook |
| Language: | English |
| Published: |
Perlis
School of Microelectronic Engineering, Universiti Malaysia Perlis
2010.
|
| Subjects: | |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Search Result 1