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| 003 | MY-KaKUK | ||
| 005 | 20210816100956.0 | ||
| 006 | m f d | ||
| 007 | cc cgu|||uuuuu | ||
| 008 | 130710s2006 nyua fsb 001 0 eng d | ||
| 020 | |a 9780815518280 (ebook) | ||
| 020 | |a 0815518285 (ebook) | ||
| 035 | |a (OCoLC)ocn852376500 | ||
| 039 | 9 | |a 201307101410 |b SMT |c 201307101230 |d SMT |y 201303171444 |z AYAR | |
| 040 | |a MYPMP |b eng |c MYPMP |e rda | ||
| 090 | 0 | 0 | |a TK7875 |b M533 2006 |
| 100 | 1 | |a Korvink, Jan |e author | |
| 245 | 0 | 0 | |a MEMS : |b a practical guide to design, analysis, and applications / |c edited by Jan G. Korvink and Oliver Paul. |
| 264 | 1 | |a Heidelberg, Germany |b Springer |c 2006. | |
| 300 | |a 1 CD-ROM |c 12 cm. | ||
| 336 | |a text |b txt |2 rdacontent | ||
| 337 | |a computer |b c |2 rdamedia | ||
| 338 | |a computer disc |b cd |2 rdacarrier | ||
| 504 | |a Includes bibliographical references and index. | ||
| 588 | |a Description based on print version record. | ||
| 650 | 0 | |a Microelectromechanical systems. | |
| 700 | 1 | |a Korvink, J. G. |q (Jan G.) | |
| 700 | 1 | |a Paul, Oliver. | |
| 949 | |a VIRTUAITEM |d 30000 |f 1 |x 701 |6 701004942 |a TK7875 M533 2006 | ||
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