MEMS : a practical guide to design, analysis, and applications /

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Bibliographic Details
Main Author:	Korvink, Jan (Author)
Other Authors:	Korvink, J. G. (Jan G.), Paul, Oliver
Format:	Software eBook
Language:	English
Published:	Heidelberg, Germany Springer 2006.
Subjects:	Microelectromechanical systems.
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