Cita APA (7a ed.)

Helbert, J. N. (2001). Handbook of VLSI microlithography: Principles, technology, and applications (Second edition.). Noyes Publications/ William Andrew Pub..

Cita Chicago Style (17a ed.)

Helbert, John N. Handbook of VLSI Microlithography: Principles, Technology, and Applications. Second edition. Park Ridge, N.J: Noyes Publications/ William Andrew Pub., 2001.

Cita MLA (8a ed.)

Helbert, John N. Handbook of VLSI Microlithography: Principles, Technology, and Applications. Second edition. Noyes Publications/ William Andrew Pub., 2001.