Handbook of VLSI microlithography : principles, technology, and applications /
This handbook gives readers a look at the technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process transfer coatings - including optical lithography, electron beam, ion beam, and X-ray lithography. The book's main theme is the specia...
में बचाया:
मुख्य लेखक: | Helbert, John N. (लेखक) |
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स्वरूप: | सॉफ्टवेयर ई-पुस्तक |
भाषा: | English |
प्रकाशित: |
Park Ridge, N.J.
Noyes Publications/ William Andrew Pub.,
c2001.
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संस्करण: | Second edition |
श्रृंखला: | Materials science and process technology series. Electronic materials and process technology.
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विषय: | |
ऑनलाइन पहुंच: | Table of contents Publisher description |
टैग : |
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समान संसाधन
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Handbook of VLSI microlithography : principles, technology, and applications /
प्रकाशित: (2001) - Handbook of VLSI microlithography : principles, tools, technology, and applications /
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Handbook of VLSI microlithography principles, technology, and applications
प्रकाशित: (1991) -
Handbook of VLSI microlithography principles, technology, and applications
प्रकाशित: (1991) -
The VLSI handbook /
प्रकाशित: (2000)