Handbook of VLSI microlithography : principles, technology, and applications /
This handbook gives readers a look at the technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process transfer coatings - including optical lithography, electron beam, ion beam, and X-ray lithography. The book's main theme is the specia...
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| 主要作者: | |
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| 格式: | 软件 电子书 |
| 语言: | English |
| 出版: |
Park Ridge, N.J.
Noyes Publications/ William Andrew Pub.,
c2001.
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| 版: | Second edition |
| 丛编: | Materials science and process technology series. Electronic materials and process technology.
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| 主题: | |
| 在线阅读: | Table of contents Publisher description |
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书本目录:
- Issues and Trends Affecting Lithography Tool Selection Strategy
- Resist Technology: Design, Processing and Applications
- Lithography Process Monitoring and Defect Detection
- Techniques and Tools for Photo Metrology
- Techniques and Tools for Optical Lithography
- Microlithography Tool Automation
- Electron Beam ULSI Applications
- Rational Vibration and Structural Dynamics for Lithographic Tool Installations
- Applications of Ion Microbeam Lithography and Direct Processing
- X-Ray Lithography.