Handbook of VLSI microlithography : principles, technology, and applications /
This handbook gives readers a look at the technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process transfer coatings - including optical lithography, electron beam, ion beam, and X-ray lithography. The book's main theme is the specia...
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| Auteur principal: | |
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| Format: | Logiciel eBook |
| Langue: | English |
| Publié: |
Park Ridge, N.J.
Noyes Publications/ William Andrew Pub.,
c2001.
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| Édition: | Second edition |
| Collection: | Materials science and process technology series. Electronic materials and process technology.
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| Sujets: | |
| Accès en ligne: | Table of contents Publisher description |
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