Sol-gel BST Thin Films for FeFET Applications : Fabrication and Characterization /
The main objective in this work is to obtain the memory behavior of the ferroelectric BST thin films when used in the metal-ferroelectric-insulator-semiconductor (MFIS) structure. Additional objectives will be to derive the fabrication details, material and electrical characteristics.
Saved in:
| Main Author: | |
|---|---|
| Format: | Thesis Book |
| Language: | English |
| Published: |
Perlis, Malaysia
School of Microelectronic Engineering
2012.
|
| Subjects: | |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Be the first to leave a comment!