Sol-gel BST Thin Films for FeFET Applications : Fabrication and Characterization /
The main objective in this work is to obtain the memory behavior of the ferroelectric BST thin films when used in the metal-ferroelectric-insulator-semiconductor (MFIS) structure. Additional objectives will be to derive the fabrication details, material and electrical characteristics.
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| Format: | Thesis Book |
| Language: | English |
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Perlis, Malaysia
School of Microelectronic Engineering
2012.
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