Structural, Optical and Electrical Characterization of Porous Silicon Prepared by DC and AC Electrochemical / \c Husnen R. Abd

This thesis undertakes the fabrication, optimization, characterization and analysisof metal - semiconductor-metal photodetector device (MSM -PD) based on PS. This study has examined n-type (100) orientation using direct current photoelectrochemical etching (DC-PECE) at different etching times, and a...

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Bibliographic Details
Main Author: Husnen R. Abd (Author)
Format: Thesis Book
Language:English
Published: Perlis, Malaysia Institute of Nano Electronic Engineering , University Malaysia Perlis 2014
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Summary:This thesis undertakes the fabrication, optimization, characterization and analysisof metal - semiconductor-metal photodetector device (MSM -PD) based on PS. This study has examined n-type (100) orientation using direct current photoelectrochemical etching (DC-PECE) at different etching times, and also alternating current photoelectrochemcal etching (AC-PECE) using different etching current density.
Physical Description:xvii, 104 pages illustrations 30 cm.
Bibliography:Includes bibliographical references (pages 90-101)