Design and analysis of planar electromagnetic micro coils for micro-electro-mechanical system (MEMS) application / Nurul Fakhrinazmi Fauzi.
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| Main Author: | Nurul Fakhrinazmi Fauzi (Author) |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
2018.
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| Subjects: | |
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