APA (7th ed.) Citation

Quirk, M., & Serda, J. (2001). Semiconductor manufacturing technology. Prentice Hall.

Chicago Style (17th ed.) Citation

Quirk, Michael, and Julian Serda. Semiconductor Manufacturing Technology. Upper Saddle River, NJ: Prentice Hall, 2001.

MLA (8th ed.) Citation

Quirk, Michael, and Julian Serda. Semiconductor Manufacturing Technology. Prentice Hall, 2001.

Warning: These citations may not always be 100% accurate.